JPH02138421U - - Google Patents
Info
- Publication number
- JPH02138421U JPH02138421U JP4787689U JP4787689U JPH02138421U JP H02138421 U JPH02138421 U JP H02138421U JP 4787689 U JP4787689 U JP 4787689U JP 4787689 U JP4787689 U JP 4787689U JP H02138421 U JPH02138421 U JP H02138421U
- Authority
- JP
- Japan
- Prior art keywords
- gas phase
- reaction device
- phase reaction
- susceptor
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 238000010574 gas phase reaction Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4787689U JPH02138421U (en]) | 1989-04-24 | 1989-04-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4787689U JPH02138421U (en]) | 1989-04-24 | 1989-04-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02138421U true JPH02138421U (en]) | 1990-11-19 |
Family
ID=31564194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4787689U Pending JPH02138421U (en]) | 1989-04-24 | 1989-04-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02138421U (en]) |
-
1989
- 1989-04-24 JP JP4787689U patent/JPH02138421U/ja active Pending
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